Paper Title
XPS Analysis of Heated Highly Hydrogenated DLC Surfaces

Abstract
This study explored the structural transformations occurring in diamond-like carbon (DLC) films upon heating, as analyzed through X-ray photoelectron spectroscopy (XPS). Experimental samples were prepared from both hydrogenated amorphous carbon (a-C:H) and hydrogenated tetrahedral amorphous carbon (ta-C:H). The carbon 1s spectra were reduced from both sample surfaces by heating them to 600°C. These spectra were separated into two waveforms;the SP3 and the SP2 bonded components. In a-C:H, a decrease was observed in the componentwaveform with both component percentages remaining constant,while the ta-C:H samples exhibited a reduction in theSP2 bonded component. Next, when separated into four waveforms, the a-C:H sample showed adecrease in the bulk component of the SP3 and SP2, whereas the ta-C:H sampledemonstrated a reduction primarily in the bulk component of SP3 and the surface component of SP2. These findings highlight the distinct structural changes induced by annealing in different types of DLC samples, specifically a-C:H and ta-C:H. Keywords - Diamond-like carbon(DLC), hydrogenated amorphous carbon (a-C:H), hydrogenated tetrahedral amorphous carbon (ta-C:H), X-ray photoelectron spectroscopy(XPS)