Paper Title
Shape Measurement Analysis of Indium Tin Oxide Thin Film by Sinusoidal Phase Modulating Interferometry Techniques

Abstract
This paper presents the interference signal of sinusoidal phase modulating interferometry (SPMI) and its Fourier transform are derived. Based on these equations, a new method for elimination of a dispersion effect in SPMI is proposed to measure exactly a reflecting surface position.Sinusoidal phase modulating interferometer to realize real-time surface profile measurement is proposed, and its measuring principle is analyzed theoretically with simulation. The surface shape is derived from the frequency components of the detected interference signal. Then, the surface shape of Indium tin oxide (ITO) thin film is measured. Measurement accuracy exact to nanometer range can be obtained by using this sinusoidal phase modulatinginterferometry. The impartial of this research is to accomplish enhanced of the thin film shape measurement in the range of nanometer skill.The surface shape of the sample was experimentally measured to an accuracy of less than 100nm range. Keywords - Interferometry, ITO,Nanometer, Shape Measurement, Sinusoidal Phase Modulating Interferometry, SPMI, Thin Film.