Paper Title
Variation in Vertically Oriented Carbon Nanowall Grown on Metal Oxide and Nitride by External Stimulation

Abstract
In this study, variations of graphene grown vertically on metal oxides and nitridescaused by external stimulation were examined. ITO(Tin-doped Indium oxide), AZO(Aluminum doped Zinc oxide) and TiN (Titanium nitride) 4-inch target were sputted on cleanedsilicon (Si) wafers viaradio frequency sputtering system.And then, the carbon nanowalls (CNWs) were grown on ITO, AZO and TiN via microwave plasma enhanced vapor deposition (MPECVD) with a mixture of hydrogen(H2) gas and methane(CH4) gas. Acetone matter of 100 mL in Erlenmeyer flask adapted as the external stimulation, which is lift off process-liked. Thesurface and structural characteristics of samples were observed by field emission scanning electron microscope (FESEM) and Raman spectroscopy. In surface and structural analysis, as-grow, CNW/ITO and CNW/AZO showed no variations by external stimulations, but CNW/TiN appears changes.Therefore, we conducted additional XPS analysis on dissociated CNW/TiN. Keywords - Carbon-based Nanomaterials, Carbon Nanowall, External Stimulation, Metal Oxide and Nitride.