Paper Title
Tin Alloy for Extreme Ultraviolet Generation

Abstract
Here, we show two kinds of tin alloy and their laser plasma to generate 13.5 nm extreme ultraviolet light. For the case of gallium-tin alloy (Ga:Sn), the alloys had -25°C freezing point alloys from a meta stable liquid according to DSC cooling process. The alloys can be treated as liquid droplet at 40°C. A Nd:YAG laser (1064 nm, 1 ns, 7.1x1010 W/cm2) ablated the alloys, obtaining a similar EUV emission intensity to Sn in spite of small quantity of Sn. In the case of lithium-tin alloy (Li:Sn),an electrochemically synthesis gave compounds of Li0.2Sn and Li2.5Sn. These surface was easily oxidized at ambient condition, while their beneath kept their original phase and exhibited an efficient and relatively monochromatic 13.5 nm light for the illumination of the same laser intensity as the case of Ga:Sn . These tin alloy would be useful to obtain the 13.5 nm light by combining with a conventional Nd:YAG laser. Keywords: Tin Alloys, Gallium, Lithium, Extreme Ultraviolet, Nd:YAG laser.