Paper Title
Aerobic Biodegradation of Spent TMAH (Tetramethyl Ammonium Hydroxide) and Photo Resist Solution in Semiconductor Industries (LIFE BITMAPS Project): Lab-Scale Tests and Preliminary Process Analysis

Abstract
Microelectronic industry produces significant amounts of wastewaters containing inorganic substances such as fluorides, phosphates, and organic pollutants such as acetic acid (CH3COOH), and tetramethylammonium hydroxide (C4H13NO, TMAH). Objective of this work is the description of the depuration process of three types of wastewaters, representative of real liquid wastes coming from a multinational company of semiconductor production by an integrated chemical and biological process. The research was supported by a LIFE project (N. LIFE 15 ENV/IT 000332) (http://www.lifebitmaps.eu/) Keywords - Electronic Industry; Industrial Wastewaters; Tetramethyl Ammonium Hydroxide; Removal Pollutants; Laboratory and Pilot Scale Tests; Saving Industrial Water Consumption