Paper Title
Decimation Of Sampling Points To Construct Metrological Frame

Abstract
In general, the profile measuring machine uses the displacement sensor attached on movable mechanism in order to measure the object. It could measure the object profile by the amount of movement of the displacement sensor and output of the displacement sensor. When measuring the object, metrological frame is important as a reference. The movable mechanism as the linear stage is used as the metrological frame. However, the linear stage has a profile error according to the movement. We proposed a new method to distinguish the profile error of the metrological frame from the output of the displacement sensor. This method requires two linear stages and a displacement sensor. The object profile and profile error of the movable mechanism are determined by calculation using output of the displacement sensor. The validity of the new method was confirmed by the simulation and experiment. Due to the movement of two stages, the sampling points and the experiment equation are dramatically increasing. So it is necessary to decimate the sampling points is necessary keeping the separation of the profile errors from the sensor information accurate. In this paper, some decimation method are proposed and the validities of them are examined by simulation. Index Terms - Form Measurement, Metrology Frame, Error Separation, Two Parallel Stages, Decimation of Sampling Points.