Paper Title
2.4 GHZ Suspended Six-Port Transformer-Based Power Divider By Using Mems Technology

Abstract
Utilizing micro-electro-mechanical systems (MEMS) technology, a transformer-based power divider with six-port suspending structure are developed in this study for 2.4 GHz wireless communication applications. The proposed power divider is featured with chip size (2.9 mm � 2.8 mm � 13 μm) and constructed of an 8-μm-thick Cu bottom electrode, a 5 μm-height supporting copper post, and an 8-μm-thick suspended spiral copper conducting layer with 13 μm air gap. The main structure is consisted of two transformers and six input/output matching capacitors to achieve two single-to-differential paths simultaneously for further reducing the complex multiple-ports transceiver chip size. Measured results exhibit the radio frequency (RF) characteristics, input return losses are around10 dB and less than 1� phase imbalance at 2.4 GHz operating frequency. Index Terms � MEMS, transformer-based, power divider, suspending structure.