A Novel Microfabrication Method for SU-8 Based Pressure Sensor
This paper describes the novel development of SU-8 based MEMS capacitive pressure sensors. The device is inexpensive, simple to fabricate, lightweight, and accessible. This method is based on photolithography, but does not need an ultra-clean room and high precision mask production equipments. We demonstrated that the proposed pressure sensor can measure pressure with 22 pF/kPa sensitivity. The fabricated micropressure sensor has circular diaphragm with 2.5mm radius and 10μm thickness under silicon substrate. This low-cost device should be useful for applications in public health, environmental monitoring.
Keywords- Pressure sensor, SU-8, Microelectromechanical System (MEMS).