Paper Title
XPS Spectrum of DLC Thin Films Changed by Argon ion Sputtering

Abstract
We have investigated the bonding state of Diamond-like carbon (DLC) films by X-ray photoelectron spectroscopy (XPS). Different types of the DLC films (tetrahedral amorphous Carbon: ta-c and amorphous Carbon: a-c) were prepared on silicon wafer using a T-shape filtered arc deposition system (T-FAD). As a result of performing argon ion etching in order to remove the oxide film on the DLC film, the main component of the XPS C 1s spectrum became sp2 hybrid orbital. We have obtained experimental results that sp3 hybrid orbitalis the main component of this ta-c samples by several evaluation methods. Therefore, repeating the low energy etching cycle, as a result of increasing the waveform separation method to 4 components, the sp3 surface component were decreased by etching, and sp2 bulk component strength was increased. Keywords - Diamond-like carbon, XPS, ta-C, a-C.